Equipment

Characterization equipment

  • Probe station
  • HP 4145B - Semiconductor parameter analyzer
  • UV-Vis Spectrophotometer (200 nm-1100 nm)
  • IR laser source (1330 nm, 1550 nm)
  • UV light source (325 nm)
  • PC with LabVIEW interface

Laboratory room and other tools

  • 28 ΠΌ2
  • Rapid thermal annealing system
  • Mask aligner
  • E-1030 Ion sputter
  • Hot plate and stirring
  • Oil bath
  • Ultrasonic cleaner
  • Spin Coater ACE-200